ansoft Maxwell 3d教程.pdf
ansoft Maxwell 3d 向导式的用户界面、精度驱动的自适应剖分技术和强大的后处理器时的Maxwell 3D成为业界最佳的高性能三维电磁设计软件。可以分析涡流、位移电流、集肤效应和邻近效应具有不可忽视作用的系统，得到电机、母线、变压器、线圈等电磁部件的整体特性。功率损耗、线圈损耗、某一频率下的阻抗（R和L）、力、转矩、电感、储能等参数可以自动计算。同时也可以给出整个相位的磁力线、B和H分布图、能量密度、温度分布等图形结果。本文件是软件使用教程.希望能帮助大家·Printing HistorNew editions of this manual include material up dated since theprevious edition. The manual printing date, indicating the manualscurrent edition, changes w hen a ncw edition is printed. Minorcorrections and updates incorporated al reprint do not cause the daleto changeUpdate packages may be issued betw een editions and containadditional and/ or rep lacement pages to be merged into the manualby the user Pages which are rearranged because of changes on aprevious page are not considered to be revised.EditionDateSoftwareRevisionFebruary 1991April 199212December 1993October 19964.1September 19995.06December 20006.0WWW⊥nmTypeface ConventionsComputerCter type is used fon promptsand messages, for field names, and for keyboard entries that must be ty ped in theirentirety exactly as shown. For example, thenstruction"copy filel"means to type the w ordcopy, to type a space. and then to type filelMenu/Command Computer type is also used to display the commands that are needed to perform a specifictask Menu levels are separated by forwardslashes (/) For example, the instructionhoose File/Open"means to choose the Opencommand under the file menuItalicsItalic type is used for emphasis and for thetitles of manuals and other publications. Italictype is also used for key board entries when aname or a variable must be typed in place ofthe words in italics. For example, the instruc-rion“ copy filename” means to type the wordcopy, to type a space, and then to type then amc of a filc. such as filelKeysHelvetica type is used for labeled keys on thecomputer keyboard. For example, the instruc-tion"Press Return?"means to press the key onthe com puter that is lahcled Returnwww.docin.coInstallationBefore you use Maxwell 3D, you must1. Set up your systems graphical windowing systerm2. Install the Maxwell softw are, using the directions in theAnsell PC or UNIX Installation guideIf you have not yet done these steps, refer to the ansoft installetionguides and the documentation that came w ith your computer systemor ask your system administrator for helpsing a Graphical User InterfaceIf you are familiar with the concepts of using a mouse, menus, andother graphical user interface(GUn)tools, skip to Chapter 1“ IntroductionIf you have not used GuI systems before, this section will help youunderstand some of the terminology used in this guide. Since GUIare basically visual, the best way to learn to use them is by practicingon your systemMost gui systcms usc a mouseas a poinTing device, with whichyou can select areas on the screenfor command execution andmoving from one program toanother. Your mouse may have 2www.door 3 buttons; Maxwell 3D ignoresthe middle button on 3-buttondelsAnsoft products donot usc this button. You canprogram mouse buttons to work in non-standard ways, as you mightwant to if you are left-handed. For simplicity, the left-hand hutton(under your forefinger if you are right-handed) is called the leftbutton, and the one on far right is the right mouse button. You willprobably find the terms intuitive once you use these buttons a fewtimesPoint and click; Right clickTo choose an item with the mouse, first move it on your desk until thearrow cursor is on that item; you are now pointing" at the item. Next,ress and release the left bu tton thlled"clicking " Point-andclick is the most common action you will make with your mouseally, click" refers to a lefise button clickYou can sometimes use your right mouse button to access or entercommands. In the 3d Modeler for instance, a right mouse buttonclick causes a short menu of commands to appear at the moustcursor. Generally, right click "refers to a right mouse button clickDouble-ClickOccasionally you may want to sclect all of thc text in a box,orperform a special lask(such as indicating the end of drawing a linewhile you are using Maxwell 3D. You can do this efficiently byquickly clicking twice with your left mouse button -a doubleDragging objects; Click and HoldWhen you are drawing in the 3D Modeler, you can often use yourmouse to enter objects and move around the screen. Frequently, youwill click the mouse button and hold it down until the next part of thecommand is reached (the object is oved, the next point is enteredand so forth). If you click and hold on the edge of a w indow, you canposition, or drag, the window on your screen. You can often dragobjects in Maxwell; experiment to see w hat will moveTool BarsTool bars are shortcut methods for entering commands. There is atool bar in the 3d Modeler and most of the setup modules for severalcommand s. To use a tool bar. click the mouse cursor on the buttonyou want to use. Here is an example of a tool bar囗。圖哦良风≌固函MenusWithin each screen of maxwell 3d are areas w hich list subsets ormenus,of commands. You can access a menu by clicking your mouseon the word or button that indicates the menu. The menu is pulleddown, listing the commands available on that menu. (For examplethc New command is availablc on the File mcnu. Usually, thc mcnuwill remain displayed until you choose a command, or click on thedesktop to exit. If the menu does not remain displayed, click and holdthe mouse button, then release the button to make your choiceFile Edit viewNewopenCloseSavectrl+SSave AsImportExportExitctrl+QAn arrow on the right side of a command indicates that there is asubmenu for that command. An ellipsis (. )indicates that a pop-upwindow appears aftcr choosing this commandWhen you are asked to use a menu command, each level is separatedby a"/". Thus, to zoom in on a drawing, you would choose the viewLoom In menu command To open a new file, you would choose File/There are also pop-up menus, which appear when you righL-click ona maxwell modeler window. choose commands from thcsc menus inthe same way as from menu barsFor more information on using GUIs, refer to"User Interface"in theMaxwell Control Panel,s online help systemOther ReferencesFor detailed information on Maxwell 3d commands refer to theonline documentation for the maxwell 3d field simulatorTo start maxwell 3d, you must first access the maxwell controlPanel. for more detailed inform ation on the maxwell control panelcommands, refer to the Maxwell Control Panels online help systemwww.docin.comTable of Contents1. Introduction1-1General Procedure.1-2The Sample Problem1-4Meshes.....,,,,,,,,面2. Create aAccess the maxwell Control Panel·:.·:·甲,,,,,,,,,,2-2Start the Project managerCreate a Project directoryCreate a New project··,···············,·,,,,,,,,,,2-6Enter notes2-73. Draw the model3-1Open the project3-2Start. the 3D Modeler3-3Side window........................snaps3-6Define the problem region: Coordinates and Units ..,...... 3-7Absolute and relative coordinates3-7Grids3-7Zooming in and out of the view window3-9Create the electromagnet3-10Draw the Coil...,,.,..,3-10Draw thc Circlc........,..,...,,,......,..........3-10Create the Cylinder,,3-11Create the hole for the Core3-12Draw the Core·中··············3-13SavingP3-14Create the magnel翻...3-15Draw the magnet3-15Move the magnet3-15Toggle Off the Background..................3-16Create a termini..........,,,,,..,,,,......,,,..3-17Create the Coil terminal..........,,......,,,.,..3-18Define the Problem Region;..,;;“;##.3-20Define the Problem Region .................. 3-21Shading and rendering . ......................................3-22Exit the 3d modeler3-234 Define The problemAccess the Material Manager4-2Exclude the background·····+···,,,,,,,,,,,,,,.4-2Assign Steel to the CoreAssign Copper to the Coil4-3Assign vacuum to the problem Region.......4.......4-3Assign NdFe35 to the Magnet4-3Access the 3D Boundary/Source Manager45assign a current to the coil.....4-6Define the sourceAssigning the Source lo the Termina.........,..,,,,∴4-64-7Check the Direction of the CurrentExit the 3D Boundary/Source Manager4-85. Generate a Solution5-1Setup executive Parameters······5-2Create a Force Setup for the Magnet.5-3Create a Force Setup for the Coil and Core5-3Create a Force Setup for the entire model·········Exiting the Executive Parameters moduleSpecifying Solution Criteria·非5-5Solver type11翻自。■非非首·····:.··.·Magnetic Field SolveResidualSolve for Field and Parameters+++++++++++++++++++++;,+“++Adaptive analysisContents-2
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晶圆缺陷检测与分类的卷积神经网络
晶圆缺陷检测与分类的卷积神经网络；针对晶圆检验时扫描电镜图像的缺陷检测和缺陷分类两问题，采用了“ ZFNet”的卷积神经网络来分类晶圆缺陷，并基于该分类器实现了一种“基于块的卷积神经网络”缺陷检测算法。为了提高准确率和加快速度，又改动“更快的区域卷积神经网络”实现了另一种检测算法。第卷第期邡鑫,史峥:晶圆缺陌检测与分类的卷积神经网络ZENet classifierDarker ImIn.ril” HumpBitel检测算法示意图在训练检测器时,数据集是检测器原始尺寸的图像,且包含标记好的缺陷区域和类型。我们结构通过·系列数据扩张操作,得到组数据,随机选取相比于检测算法主作为训练集,作为测试集。要从以下三方面进行了针对性的改进算法中需要优化的参数有滑动窗口尺寸滑()针对重复计算卷积的缺点,采用先动步幅、概率阙值、面积阙值,由于无法求出统一计算特征图,再按)进行映射各参数与检测结果的明确关系式,所以采用遍历法优化参截取的办法。如图,先通过卷积网络(数。因为检测到的缺陷尽量正确和尽量检测到所有缺陷是)对输入图像计算得到其特征图,因为在输入图像矛盾的,故以精确率和召回率的调和平均值作为优上的都能映射到特征图上,所以从输入图像上按化目标,也可根据实际需要调整两者权重满足不同侧重。割取图像进行卷积运算可以替代为直接从特征图上按测试结果映射后的范围割取,从而避免多次重复计算卷积。由于用训练好的检测模型对测试集检的大小形状不·,而全连接层的神经元连接数是固定的,测,计算模式下每张图大概耗时如果检测到的缺所以对割取得到的子特征图,通过层次采样到统陷与标准答案的且类型相同,则判为正确,否尺寸以连接到全连接层。则判为错误。得到结果如表,计算得:laut Image精确率Feature Map召回率ROI其屮正确缺陷的平均表检测器测试结果数量正确错误network有缺陷(正类)图映射示意图从检测结果来看该算法基本实现∫对图像上晶圆()针对滑动窗口尺寸单·的缺点,增缺陷的检测和分类,但是值较低,缺陷检测位置不加了滑动窗口的尺寸类型,并且增加由一个全卷积网络准确,检测耗时较长,分析其原囚如下)组成的()检测出错的数据中,缺陷较大的类型易判断错,)来预判断是否有缺陷。本文采用面积缺陷较小的容易被漏掉,说明只使用一种尺寸的滑动框很分别为,长宽比分别为、共难适应尺寸变化范围较大的缺陷种尺寸的滑动窗口,依次计算其中有缺陷的概率,再从中)滑动框步幅减小则算法耗时平方倍增加,而步幅筛选出一定数量最有可能有缺陷的区域,进行非极大值抑过长造成缺陷概率分布图分辨率较差,从而检测到缺陷位制(),最后得到一定数置准确度较差量的候选区域。()相邻滑动框都有大量重叠,所以每个区域都被多()针对缺陷检测位置准确度差的缺点,次重复送入计算卷积,导致算法耗吋较长。在全连接层后连接一个边界回归层在与上述检测算法相似的图像目标检测领域,近来出用来修正缺陷位置,该回归层与分类层并列。现的很好的克服了以上缺点并取得了很好的针对本文的缺陷检测问题,直接套用标准效果,所以下面介绍如何通过改动实现品圆并不能解决问题。因为判断晶圆的缺陷类型通常需缺陷的检测与分类。要结合缺陷区域周围的图形信息,而在预判断是否有C1994-2017ChinaAcademicJournalElcctronicPublishinghOusc.Allrightsrescrved.http://www.cnki.nct计算机工程年月日缺陷吋还进行了边界回归。虽然更加准确的给出缺陷的位()将原尺寸为的图像调整为置,但送入检测网络的特征儿乎不包含缺陷周围图肜信息,使得滑动窗口尺寸能够适应缺陷大小的变化范围,也可以导致缺陷分类不准。故木文对标准徹了一些根据实际情况来具体调整。改动:得到缺陷检测算法如图,卷积网络(()将改为只判断滑动窗口内是否有缺陷,而,)将输入图僚转换成多种特征图;根据不进行边界回归,也就是只计算所有滑动窗口有缺陷的概特征图从滑动窗口中选出最有可能存在缺陷的率,选取可能性最大的个,做非极大值抑制,再选出层根据特征图中抽取出对应特征组成特可能性最大的个进行检测。征向量;检测网络()根据特征向()将卷积层的尺寸加大为,加大感受野量判断缺陷类型,并进行边界回归;最后通过和概率),从而在判断滑动框內是否有缺陷吋能参阈值对候选缺陷进行过滤即可得到最终缺陷。考更多的周围信息。Detection NetworkonFolutionnl actorSoftmaxRuI Puling liver,e Prop卟 edMS+PrubilitessionInput Image 1024*1024Fully 10 dyercrectCcrvchrionalLaver size 747图检测算法示意图模型训练和平均值作为优化目标,并且使用相同的训练集和图中的检测算法也是基于架构实现,因为卷测试集积网络提取的特征类型对相似普遍有效,故其卷积网络的测试结果参数是直接迁移第章分类器的卷积层参数。但是用训练好的检测模型对测试集检测,和的参数则需要通过方法进行训练,标准计算模式下每张图大概耗时,采用相同判定标准,提供了分开和联合两种训练方式。为了节约得到检测结果如表(其中负类总数与表中总数不同是因时间,本文采用联合训练方式,并结合缺陷检测问题的实为同一张图屮可能检测到多个缺陷),计算得际情况调整超参数精确率在训练时,对每张输入图像,要计算的滑动窗口召回率数量庞大(种尺寸的滑动窗口,滑动步幅)。所以从中随机抽取个作为训练集,其中正例其中正确缺陷的平均负例,且正例占比不超过。分类器采用表检测器测试结果损失函数数量正确错误在训练时,设置提供个,从中随有缺陷(正类)机选取个作为训练集,其屮正例无缺陷(负类)负例,且正例占比不超过。另外设置学从结果来看该算法各方面都优于检测算习率分类器采用损失函数,而边界回法和值更高说明检测检测缺陷类型正确归采用函数。且位置准确,而且速度也大大提高(检测一张图像耗时从为了与检测算法对比,在最后通过遍历法缩小到)。如图为检测缺陷示例,共中标注了缺陷优化和概率阈值时,同样以精确率和召回率的调位置、类型和对应概率C1994-2017ChinaAcademicJournalElcctronicPublishinghOusc.Allrightsrescrved.http://www.cnki.nct邡鑫,史峥:晶圆缺陷检测与分类的卷积神经网络I I图检测结果示例图结束语而对图像上的缺陷检测和缺陷分类这两个问题,本文提出的改动后的检测算法能够精准、快速地从图像中检测出缺陷并同吋进行分类。得益于卷积神经网络良好的特征学习能力,该检测算法能够根据标记好缺陷位置和类型的数据自动学习特征,从而尽量避免人工千预,使算法具有较强的适应能力。参考文献徐姗姗刘应安徐昇基于卷积神经网络的木材缺陷识别山东大学学报工学版刘云杨建滨王传旭基于卷积神经网络的苹果缺陷检测算法电子测量技术江帆刘辉王彬等基于模型的图像识别计算机工程C1994-2017ChinaAcademicJournalElcctronicPublishinghOusc.Allrightsrescrved.http://www.cnki.nct
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